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SEMI Standards Training.

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Courses for an overview on SEMI equipment automation standards cover the following main topics:

Introduction to SEMI Standards For Equipment Automation SEMI Standards For Equipment Automation In Detail
SECS-I, HSMS:
  • Serial Connection Using SECS-I
  • Network Connection Using HSMS-SS
  • Structure Of Transmitted Data

SECS-II:

  • Data Formats
  • Messages

GEM

  • Purpose
  • Equipment Data
  • Equipment Actions
  • State Models
 SECS-II:
  • Data Items
  • Message Structure
  • Transactions
  • SML

GEM:

  • Data Items
  • Alarms
  • Events
  • State Models
  • Process Programs
  • Monitoring Data
  • Equipment Services
300mm standards - overview Object Services:
  • Purpose
  • Definition Of Object
  • Object Interactions

Process Job Management:

  • Process Job Objects
  • Process Job Creation
  • Process Job State Model
  • Data Items

Carrier Management:

  • Purpose
  • Load Ports
  • Carrier Objects
  • Services

Control Job Management:

  • Control Job Object
  • Control Job Creation
  • Control Job State Model
  • Data Items
  • Working With Control Jobs

Enhanced Carrier Handoff Parallel I/O

Job Management:

  • Purpose
  • Process Jobs

Substrate Tracking

Equipment Performance Tracking

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